The PFM series from SMC are dual flow switches designed to detect microchip component adsorption in vacuum, congestion in filters and nozzles. Compact and light weight design, suitable for use with carbon dioxide, air, nitrogen or argon.
Flow rate range: 10, 25, 50,100 l/min Minimum unit setting: 0.01 l/min Repeatability: ±1%F.S. or less Grease-free Flow adjustment valve is integrated - reduced piping and space saving Response time can be set